Anything in the frequency of x-rays and above produces ionization directly through absorption or scattering of the incident photon, which is harmful, in sufficient quantities, to biological systems, because of the inhibiting of essential biochemical reactions, and the breakdown of long-chain molecules. Direct ionization requires incident energy quanta sufficient to remove electrons from the atoms they are bound to. Below a given threshold, ionization will not occur, but thermal effects, as noted in earlier posts, can be significant if field strengths are high enough. RF can produce ionization (like in the ion bottles of accelerators) but that is essentially a thermal effect. The free electrons are accelerated to high velocities by the oscillating field and collisions eventually strip other electrons from their associated atoms.
...ionize inner shell elctrons and gamma rays are involved with nuclear processes. UV is sufficient to knock outer shell electrons out.